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Author Bogdanowicz, Janusz.
Title Photomodulated optical reflectance : a fundamental study aimed at non-destructive carrier profiling in silicon / Janusz Bogdanowicz.
Imprint Berlin ; New York : Springer, 2012.

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Author Bogdanowicz, Janusz.
Series Springer Theses, 2190-5053
Springer theses.
Subject Semiconductors -- Testing -- Optical methods.
Silicon -- Optical properties.
Silicon -- Nondestructive testing.
Description 1 online resource.
polychrome rdacc
Contents Introduction -- Theory of Perturbation of the Reflectance -- Theory of Perturbation of the Refractive Index -- Theory of Carrier and Heat Transport in Homogeneously Doped Silicon -- Extension of the Transport Theory to Ultra-Shallow Doped Silicon Layers -- Assessment of the Model -- Application of the Model to Carrier Profiling -- Conclusions and Recommendations.
Thesis Ph. D. University of Leuven
Bibliography Note Includes bibliographical references.
Summary One of the critical issues in semiconductor technology is the precise electrical characterization of ultra-shallow junctions. Among the plethora of measurement techniques, the optical reflectance approach developed in this work is the sole concept that does not require physical contact, making it suitable for non-invasive in-line metrology. This work develops extensively all the fundamental physical models of the photomodulated optical reflectance technique and introduces novel approaches that extend its applicability from dose monitoring towards detailed carrier profile reconstruction. It represents a significant breakthrough in junction metrology with potential for industrial implementation.
ISBN 9783642301087 (electronic bk.)
3642301088 (electronic bk.)
364230107X
9783642301070
ISBN/ISSN 9786613942494
10.1007/978-3-642-30108-7
OCLC # 798652491
Additional Format Print version: 9786613942494


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