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LEADER 00000cam  2200649Ii 4500 
001    175286921 
003    OCoLC 
005    20160507122138.2 
006    m     o  d         
007    cr cnu---unuuu 
008    071020s1995    maua    ob    001 0 eng d 
019    162129070|a647653024|a822888293|a823829792|a823899499
       |a824090770|a824138433 
020    9780080539102|q(electronic bk.) 
020    0080539106|q(electronic bk.) 
020    1281054100 
020    9781281054104 
020    |z9780121379407 
020    |z012137940X 
035    (OCoLC)175286921|z(OCoLC)162129070|z(OCoLC)647653024
       |z(OCoLC)822888293|z(OCoLC)823829792|z(OCoLC)823899499
       |z(OCoLC)824090770|z(OCoLC)824138433 
037    81576:81576|bElsevier Science & Technology|nhttp://
       www.sciencedirect.com 
040    N$T|beng|epn|erda|cN$T|dYDXCP|dOCLCQ|dIDEBK|dE7B|dOCLCQ
       |dMERUC|dOCLCQ|dOCLCO|dOCLCQ|dOCLCF|dOCLCO|dNLGGC|dOPELS
       |dIEDUB|dOCLCQ 
049    MAIN 
050  4 TK7871.99.A45|bP55 1995eb 
072  7 TEC|x008100|2bisacsh 
072  7 PHFC|2bicssc 
072  7 TEC|x008090|2bisacsh 
082 04 621.3815/2|222 
245 00 Plasma deposition of amorphous silicon-based materials /
       |cedited by Giovanni Bruno, Pio Capezzuto, Arun Madan. 
264  1 Boston :|bAcademic Press,|c[1995] 
264  4 |c©1995 
300    1 online resource (xi, 324 pages) :|billustrations. 
336    text|btxt|2rdacontent 
337    computer|bc|2rdamedia 
338    online resource|bcr|2rdacarrier 
340    |gpolychrome|2rdacc|0http://rdaregistry.info/termList/
       RDAColourContent/1003 
347    text file|2rdaft|0http://rdaregistry.info/termList/
       fileType/1002 
490 1  Plasma--materials interactions 
504    Includes bibliographical references and index. 
505 0  Front Cover; Plasma Deposition of Amorphous Silicon-Based 
       Materials; Copyright Page; Contents; Contributors; 
       Preface; Chapter 1. Chemistry of Amorphous Silicon 
       Deposition Processes: Fundamentals and Controversial 
       Aspects; Chapter 2. Diagnostics of Amorphous Silicon (a-
       Si) Plasma Processes; Chapter 3. Deposition Conditions and
       the Optoelectronic Properties of a-Si:H Alloys; Chapter 4.
       Reactor Design for a-Si:H Deposition; Chapter 5. 
       Optoelectronic Properties of Amorphous Silicon Using the 
       Plasma- Enhanced Chemical Vapor Deposition (PECVD) 
       Technique; Chapter 6. Amorphous-Silicon-Based Devices. 
520    Semiconductors made from amorphous silicon have recently 
       become important for their commercial applications in 
       optical and electronic devices including FAX machines, 
       solar cells, and liquid crystal displays. Plasma 
       Deposition of Amorphous Silicon-Based Materials is a 
       timely, comprehensive reference book written by leading 
       authorities in the field. This volume links the 
       fundamental growth kinetics involving complex plasma 
       chemistry with the resulting semiconductor film properties
       and the subsequent effect on the performance of the 
       electronic devices produced. 
588 0  Print version record. 
650  0 Amorphous semiconductors|0http://id.loc.gov/authorities/
       subjects/sh85004577|xDesign and construction.|0http://
       id.loc.gov/authorities/subjects/sh2002006372 
650  0 Silicon alloys.|0http://id.loc.gov/authorities/subjects/
       sh85122518 
650  0 Plasma-enhanced chemical vapor deposition.|0http://
       id.loc.gov/authorities/subjects/sh90002917 
653 0  Semiconductors 
655  4 Electronic books. 
700 1  Bruno, Giovanni.|0http://id.loc.gov/authorities/names/
       n84116523 
700 1  Capezzuto, Pio.|0http://id.loc.gov/authorities/names/
       n95030401 
700 1  Madan, A.|q(Arun)|0http://id.loc.gov/authorities/names/
       n85063306 
776 08 |iPrint version:|tPlasma deposition of amorphous silicon-
       based materials.|dBoston : Academic Press, ©1995
       |z012137940X|z9780121379407|w(DLC)   95012433
       |w(OCoLC)32311752 
830  0 Plasma--materials interactions.|0http://id.loc.gov/
       authorities/names/n86731624 
956 40 |uhttp://proxy.opal-libraries.org/login?url=http://
       search.ebscohost.com/login.aspx?direct=true&scope=site&
       db=nlebk&AN=207143|zView online 
990    eBooks on EBSCOhost|bEBSCO eBook Subscription Academic 
       Collection - North America|c2016-05-06|yMaster record 
       variable field(s) change: 245 

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